Faster process times with high-quality and homogenous films 

SC Optima Series

SC Optima Series

The SC Optima Series is the next generation of large batch systems for Atomic Layer Deposition (ALD). The SC Optima has been carefully optimised to deliver high-quality and uniform coatings to all types of 3D objects in record time, streamlining every step of your door-to door processes, from loading to unloading.

Experience a new level of precision and efficiency in 3D part coating with the new patent-pending chamber from Swiss Cluster. The innovative and scalable chamber has been optimally designed to adapt to all types of 3D parts and coating material to deliver exceptional coating homogeneity at unparalleled process speeds. 

Our single chamber approach makes it easy to load and unload 3D parts from the cleanroom, while the rest of the system is accessed from the grey room. This also allows for ultra-fast heating and cooling of both the chamber walls and the parts themselves. 

Ultra-Fast Process

Door-to-door process times with the standard volume of 143 L

5 min

Loading- Closing Door

30 min

PumpDown/Heat-up of Chamber to 300°C from 25°C

150 min

Bakeout of Parts to Reach ~300°C

150 min

Process Time for 100nm Al₂O₃

100 min

Cooldown of Chamber from 300°C to 150°C/Venting

5 min

Open Door-Unloading

Technical Specifications

Door-to-door process times with the standard volume of 143 L

Chamber dimensions

Adapted to your 3D parts and coating material

143 L – 1000 L

640x640x350 mm – 900x1600x700 mm


Easy Front loading with guided cart

Custom-made frame holders for 3D parts

Cleanroom compatible

Process Temperatures

Up to 500°C


Up to 8 gas sources with 6 individual inlets

Ozone option

Standard Materials

Al₂O₃, ZnO, SiO₂, TiO₂, Y₂O₃, Nitrides

Novel bubbler delivery system optimised for low vapour pressure precursors

500 nm Al₂O₃ < 1% 1-sigma uniformity

Substrate Sizes

Multiple substrates or 3D objects of various shapes and sizes

Dimensions of chamber and holder are optimally adapted to the parts and coating material

Optimally designed for you

The SC Optima be customised to meet your material and process requirements.
Contact us for quotations or any other inquiries.